Micro and Nano Engineering Research Laboratory:
Micromachining is a miniaturization technology that has revolutionized the fabrication of microscale devices and systems. Although the greatest success of micromachining has been the miniaturization and integration of electrical circuits, there is tremendous potential associated with the miniaturization and integration of mechanical, magnetic, fluidic, optical, thermal, and biological systems. This expanded view of miniaturization is most often referred to as either micro-electro-mechanical systems (MEMS) or microsystems technology. Specific subfields also have names and acronyms: microfluidics, micromagnetics, magnetic MEMS, microphotonics, optical MEMS, micro-opto-electro-mechanical systems (MOEMS), bio-MEMS, etc. As the constant advancement of micromachining technologies has enabled what is now referred to as nanomachining, a new set of terms and acronyms have appeared with the prefix “micro” replaced with “nano” (e.g., NEMS, nanofluidics, nanooptics, etc.). The research in laboratory has focused on the development of novel microscale and nanoscale sensors, actuators, systems, and the fabrication technologies used to produce them. A special emphasis has been directed towards magnetic, electrochemical, and biological systems due to their unique capabilities and broad utility.

Complete list of past and present MEMS/Nano research activities.